About this opportunity
Oxford Instruments lists this Field Service Engineer I (PT) opportunity in chicago, Illinois. Review the employer’s description below for duties, qualifications and application requirements.
Job description
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Field Service Engineer I (PT)
Date:
Sep 25, 2026
Location:
Chicago, IL, US
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Job Function:
Technical
Business Unit:
Plasma Technology
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Field Service Engineer - Plasma Technology
About Oxford Instruments
Our purpose is to accelerate the breakthroughs that create a brighter future for our world. Our technology and scientific expertise enable our customers to discover and bring to market exciting new advances that drive human progress. We aim to be the scientific instrumentation partner in every significant lab and production facility across the world
Location
REMOTE - North America -based - Midwest -Chicago,USA . Candidates must reside within reasonable travel time (typically 60 minutes) of a major airport to support frequent weekday travel to customer sites.
The Role
Represent Oxford Instruments by delivering world-class technical support, installation, and maintenance for plasma etch and deposition systems (e.g., PlasmaPro, FlexAL, Estrelas etcher). This role demands a hands-on problem solver with strong technical acumen, clear communication skills, and a proactive mindset. You'll collaborate across teams, escalate issues when needed, and maintain detailed documentation to support continuous improvement. With extensive travel across customer sites, you'll play a critical role in driving customer satisfaction and advancing cutting-edge semiconductor technologies.
Key Responsibilities
* System Installation & Commissioning Lead the installation and commissioning of advanced plasma etch and deposition systems (RIE, CVD, ICP, ICPCVD, ALE, ALD), ensuring full compliance with customer specifications, cleanroom standards, and process readiness.
* Preventive & Corrective Maintenance Execute scheduled and emergency maintenance with precision. Diagnose root causes beyond surface-level symptoms and validate repairs against stringent vacuum tolerances, leak-up rates, and process benchmarks.
* Customer Engagement & Technical Training Build trust and long-term relationships through responsive communication and hands-on training. Empower customers to operate and maintain systems confidently across key processes.
* Advanced Troubleshooting Resolve complex hardware, and software issues using specialized tools (vacuum leak detectors, RF power meters, DVMs, LCR meters, multimeters). Provide remote support when needed to minimize downtime and maximize uptime.
* Calibration & System Upgrades Calibrate critical components (AMUs, RF Generators, APCs, MFCs) and implement performance-enhancing upgrades (turbo pumps, PLCs, breakers) to ensure optimal system reliability and throughput.
Required Qualifications & Experience *Education & Industry Background
o Bachelor's degree in Electrical Engineering, Mechanical Engineering, Physics, or a related technical field.
o Equivalent hands-on experience in semiconductor equipment service may substitute.
o3-5 years of field service experience in the semiconductor industry, with a focus on plasma etch and deposition systems.
o Familiarity with cleanroom operations and safety protocols.
* Vacuum & Power Systems
o Hands-on experience with vacuum technologies: turbo pumps, cryo pumps, roughing pumps.
o Skilled in troubleshooting 208V electrical systems and 24V control subsystems
Experience with RF power components and pneumatically driven
* Diagnostics & Technical ToolsoProficient with diagnostic instruments:
*Vacuum leak detectors
* RF power meters
* DVMs, LCR meters, multimeters, megohm meters
o Ability to read and interpret mechanical, pneumatic, and electrical schematics and plumbing diagrams.* Process Knowledgeo Strong understanding of RF theory and inductively coupled plasma (ICP) systems.
o Familiarity with semiconductor processes: RIE, PECVD, ICP, ALD.
* Physical & Travel Requirementso Hold a valid driver's license and safe driving record, passport, and ability to travel independently.
o Must be physically agile and comfortable working in confined or awkward spaces.
o Capable of independently lifting and handling equipment weighing up to 50 lbs.
o Able to commit to extensive weekday travel to support customer installations and service needs, Monday through Friday
Preferred Skills & Attributes * Platform & Component Experience
o Experience with Brooks platforms, Pfeiffer/Edwards pumping systems, and MKS components.
o Knowledge of calibration and optimization of APCs and MFCs.
*Work Ethic & Collaboration o Strong manual dexterity and ability to maintain a clean, organized workspace in cleanroom attire.
o Proactive problem-solving and openness to continuous learning.
o Effective communicator with strong listening skills.
o Adaptable to evolving technologies and customer needs.
o Comfortable working independently or as part of a team.
What Sets You Apart: Commitment to Service Excellence
* Passion for solving complex technical challenges with precision and care.
* Proactive in anticipating customer needs and delivering timely, high-quality solutions.
* Builds trust through clear communication and confident issue resolution.
* Eager to learn, grow, and collaborate to uphold the highest standards of service
Compensation
The expected salary for thisfull-time, benefited position is between$75,000 - $90,000 . The actual compensation will be determined considering factors such as relevant skills and experience and other factors permitted by law.
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Nearest Major Market: Chicago
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Who can apply
Review the original listing for work authorization, qualifications and employer requirements.